This is a sample page from the help file for DataPlayer, a software application used to analyze logs from semiconductor production control software. The material is reprinted here with the client's permission. This material is ©2004 by Andy Humphrey and may not be reprinted without permission.
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Analysis Parameters
By selecting Edit/Analysis Parameters from the Main Interface menu, the user can specify parameters which affect how Data Player analyzes for endpoints and faults.
The General Tab shows a list of wafers from the currently loaded logfile. If a single data file is loaded rather than a logfile, that wafer will be the only one listed. If some of the data files listed in the current logfile are not present in the same directory, those files will not be listed here and cannot be analyzed. The list can be sorted in any column by single-clicking on the column header. Double-clicking on a wafer will cause it to toggle between checked and unchecked -- unchecked wafers will not be analyzed during the playback. The Select All button will cause all displayed wafers to be marked for analysis (see filtering in the next paragraph); the Select None button will cause all displayed wafers to be unmarked. The Reverse Selection button will reverse all displayed wafers -- checked wafers will become unchecked and unchecked will be checked. Clicking the Wafer Information button will display a dialog containing detailed information on the wafer selected on the list.
The ProPak Recipe# drop-down menu allows the user to filter the list by a specific recipe. Once this is done, four more menus appear: TCP/IP EI Lot #, Chamber, Slot, and Machine. Each of these will further filter the list so that only wafers that meet all criteria will be listed. Note that when the list is filtered in this manner, the Select All, Select None, and Reverse Selection buttons affect only the displayed wafers. For example, when the entire list is displayed if the user presses "Select All", all wafers will be selected. If the list is then filtered by recipe 1 and "Select None" is pressed, then all recipe 1 wafers will be deselected. If the list is then unfiltered (by selecting recipe ALL), the new list will show all wafers except recipe 1 now selected.
If the user selects the OK button when the list is filtered, any undisplayed wafers will be automatically unchecked before returning to the main interface.
Along the top of the General tab are more controls the user can select. "Replay Using Original Settings" uses the settings listed in the logfile or the wafer data file rather than the settings on the Endpoint tab (see below). If no endpoint information is found (generally this happens only when running a single data file using an old format that doesn't have a header) then Data Player will use the settings from the Endpoint tab instead.
If "Pause after each wafer" is selected, the user must press "Next File" after each wafer is run; otherwise, the wafers will run without stopping until the entire logfile is complete. The "Enable Fault Detection" and "Enable Endpoint Analysis" selections indicate which analyses to be performed during playback (at least one of them must be selected). "Chop" indicates how much time (in seconds) of data to ignore at the end of a wafer data file. The "Wafer Information" button brings up a dialog with detailed information on the wafer selected in the list below. The "Create Logfile" button allows the user to create a new logfile which contains only wafers which are currently visible and checked.
The Endpoint tab allows the user to specify the endpoint analysis parameters to be used if the wafers are not being analyzed using the original settings. Even if original settings are being used, some older data files don't have the settings in the headers and will use the settings on this tab instead. The settings here will be automatically loaded and saved to the file "current endpoint params.txt", however the Save and Load buttons can be used to allow the user to save or load endpoint parameters from any file. In this manner a user can create a library of endpoint parameters that can easily be loaded as needed. The "Import" button allows the user to select an OES data file and the settings from the header will be imported into Data Player. The "Extra Plot" dropdowns are used to specify which bandpasses of interest will be plotted on the Additional Plots tab of the Main Interface
Note that the list of bandpass ranges cannot be edited if the user has loaded a Virtual Bandpass file.
The Fault Detection tab allows the user to specify the parameters used to analyze wafers for faults. These parameters are automatically loaded from and saved to the file "fd_default.set", although the load and save buttons can be used to load and save the parameters to any filename. This allows the user to create a library of fault parameters that can easily be loaded as needed. To add a fault, click on the Add Fault button. To edit a fault, either select a fault and click on the Edit Fault button, or double click on a fault. To delete a fault, select a fault and select the Delete Fault button.
When a fault is added or edited, the Add or Edit Fault dialog appears. This allows the user to create or modify a fault condition as required. The Double Fault checkbox means that the user will indicate two fault conditions, and both must be satisfied for a fault to be triggered. Note that for this application, the following fields have no effect on the fault analysis: Fault Type, Send Email Upon Fault, Send TCP/IP Message Upon Fault, Send Immediate Endpoint Upon Fault. Also, at this time the Active checkbox has no effect; if the user wants a given fault not to be detected, it must be deleted from the fault list.